반도체 용어사전 위키

The low pressure portion of a low frequency wave creates a small bubble or cavity in the solution. These bubbles are filled with vapor and are oscillated by the sonic energy. These bubbles collapse resulting in cavitation. Cavitation has sufficient power to overcome the particle to substrate adhesion forces. The threshold pressure required to initiate cavitation is a strong function of the pulse width and the power input. (출처 : 세미파크)