검색창 새문서 최근바뀜 전체문서(270) 파일함 최근토론 위키톡 카테고리 편집 위키정보 운영자 dicpedia 개설일 16.12.16 위키타입 Personal 테마 과학기술 총 편집자수 1 총 문서수 270
새문서 최근바뀜 전체문서(270) 파일함 최근토론 위키톡 전체문서 문서색인순 카테고리순 태그순 색인 전체 ㄱㄴㄷ ABC 123 ㄱ ㄲ ㄴ ㄷ ㄸ ㄹ ㅁ ㅂ ㅃ ㅅ ㅆ ㅇ ㅈ ㅉ ㅊ ㅋ ㅌ ㅍ ㅎ ABC 123 기타 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 0 1 2 3 4 5 6 7 8 9 전체(270) encapsulation epitaxy epitaxy by CVD etch anisotropy etch selectivity evaporation excimer laser fluorine in SiO2 g - line lithography gallium arsenide, GaAs gate stack grain boundary hard bake helicon plasma i - line lithography i-line resist implantation damage implantation energy inter-layer, inter-level dielectric, ILD ion beam lithography, IBL ion implantation ionization energy killer defect latch Up lithography low-k dielectric, low k megasonic metalization microwave plasma, MW plasma mobility nanometer nitrogen trifluoride nitrous oxide oxide p-n junction particle particle counter pellicle phase shifting mask(PSM) photomask photomask negative photomask,reverse polarity photomasking phtomask positive pinhole polishing raster scan recipe reclaim wafer remote plasma, downstream plasma resist lifting reticle sacrificial etchback sccm silicon nitride, Si3N4 slurry soft bake sputter etch step and repeat projection thermal oxidation, thermal oxide titanium oxide, TiO3 torr trench vapor priming variable shape beam vector scan volatile memory wet etching yield zeta potential
위키만들기
위키만들기
